This dataset, titled "Self-Aligned Heterogeneous Quantum Photonic Integration," was published on April 28, 2026, by researchers Ngan, Choi, Chang, Kang, and Sun. It contains a single compressed file of 2.7 MB (md5:18839db144ff6c26530fc41bd82e65b4) and is licensed under Creative Commons Attribution 4.0 International. The dataset supports the study and development of heterogeneous quantum photonic integration, specifically focusing on self-alignment techniques for quantum photonic devices.